Micromotive MEMS -> Film deposition, Thin film technology, Micro structuring, Photo lithography, Micro analytics

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width="700" bgcolor="#FFFFFF"> </td> </tr> </table> <table width="900" border="0" cellpadding="0" cellspacing="0">  <tr> <td width="30" height="565"></td> <td width="640" valign="top"> <table width="640" border="0" cellpadding="0" cellspacing="0">  <tr valign="top"> <td height="70" colspan="3" valign="top"> <table width="100%" border="0" cellpadding="0" cellspacing="0"> <tr valign="top"> <td height="45" colspan="8" valign="top" nowrap> <h1><font face="Arial, Helvetica, sans-serif" color="#999999" size="6" ><b>   </b>MEMS Technology</font></h1></td> </tr> </table> <table width="100%" border="0" cellpadding="0" cellspacing="0"> <tr valign="top"> <td height="2" valign="top" colspan="8"> <hr size="2" noshade> </td> </tr> </table> </td> </tr> <tr> <td height="80" colspan="3" valign="top"> <div align=justify class="Stil8"> To implement your ideas we have a wide range of micro fabrication processes and technologies available. To offer one source we have selected partners for services we do not have in house. </div> </td> </tr> <tr> <td width="310" height="445" valign="top"> <table width="310" border="0" cellpadding="0" cellspacing="0">  <tr> <td width="310" valign="top" class="Stil8"> <div id="nav2" onmouseover="document.getElementById('imi').firstChild.src='Grafiken/Beschichtung.jpg'; document.getElementById('txt1').firstChild.data='Thin film deposition'; document.getElementById('txt2').firstChild.data='For the generation of functional or masking films we have a variety of processes and materials available. We are able to deposit lots of metals, oxides and other materials. Film thicknesses can be varied from a few nanometer up to a few 100 micrometer. It is possible to deposit on materials like glas, silicon, plastic and others.   '; document.getElementById('mhr').href='thin film deposition.php';"><a href="thin film deposition.php" target="_top" style="text-decoration:none;"><h2 id="hnav2">Thin film deposition</h2> <span id="txtnav2">Evaporation, sputter deposition, oxidation, electroplating, ion implantation etc.</span><span id="lnknav2">[more->]</span></a></div> </td> </tr> <tr> <td valign="top" class="Stil8"> <div id="nav2" onmouseover="document.getElementById('imi').firstChild.src='Grafiken/Strukturierung.jpg'; document.getElementById('txt1').firstChild.data='Micro structuring'; document.getElementById('txt2').firstChild.data='For the generation of functional components we have structuring processes like wet chemical and dry chemical etching. With these we are able to pattern metallic films, silicon or silicon dioxide. Film thicknesses can start from a few nanometer up to some micrometer. Furthermore we can also etch completely through silicon substrates.   '; document.getElementById('mhr').href='mems technologies.php';"><a href="mems technologies.php" target="_top" style="text-decoration:none;"><h2 id="hnav2">Micro structuring</h2> <span id="txtnav2">Etching of metals, silicon, silicon dioxide, silicon nitride etc.</span><span id="lnknav2">[more->]</span></a></div> </td> </tr> <tr> <td valign="top" class="Stil8"> <div id="nav2" onmouseover="document.getElementById('imi').firstChild.src='Grafiken/Lithografie.jpg'; document.getElementById('txt1').firstChild.data='Photolithography'; document.getElementById('txt2').firstChild.data='The basis for every micro processing is photolithograpy. Photolithography defines the desing that is applied on or into the substrate by subsecuent processes. Depending on the following process we have different kinds of photolithography to use. For minimum feature sizes of 400nm we use thin photo resist processes. Lift-off processes are used for not etchable materials like nobel metals. Thick photo resists are used for electroplating.   '; document.getElementById('mhr').href='photolithography.php';"><a href="photolithography.php" target="_top" style="text-decoration:none;"><h2 id="hnav2">Photolithography</h2> <span id="txtnav2">Positive and negative lithograpy, lift-off lithography etc.</span><span id="lnknav2">[more->]</span></a></div></td> </tr> <tr> <td valign="top" class="Stil8"> <div id="nav2" onmouseover="document.getElementById('imi').firstChild.src='Grafiken/diced pcb.jpg'; document.getElementById('txt1').firstChild.data='Back end processes'; document.getElementById('txt2').firstChild.data='Following the micro structuring precision dicing is used to separate micro components from the substrate. By the use of anodic bonding we can capsulate mems parts, by wire bonding we add interconnetions from the mems parts to circuit boards for instance.   '; document.getElementById('mhr').href='back end processes.php';"><a href="back end processes.php" target="_top" style="text-decoration:none;"><h2 id="hnav2">Back end processes</h2> <span id="txtnav2">Precision dicing and bonding</span><span id="lnknav2">[more->]</span></a></div> </td> </tr> <tr> <td valign="top" class="Stil8"> <div id="nav2" onmouseover="document.getElementById('imi').firstChild.src='Grafiken/Analytik.jpg'; document.getElementById('txt1').firstChild.data='Micro analysis'; document.getElementById('txt2').firstChild.data='To analyse the mems parts and films we fabricated we have analysis methods like electron microscopy, scanning probe microscopy, ellipsometry and others available.   '; document.getElementById('mhr').href='microanalysis.php';"><a href="microanalysis.php" target="_top" style="text-decoration:none;"><h2 id="hnav2">Micro analysis</h2> <span id="txtnav2">SEM, EDX, AFM, ellipsometry, surface profile measurement</span><span id="lnknav2">[more->]</span></a></div> </td> </tr> <tr> <td height="245"> </td> </tr> </table></td> <td width="20" valign="top"> <table width="20" border="0" cellpadding="0" cellspacing="0">  <tr> <td width="20" height="327"> </td> </tr> </table></td> <td width="310" valign="top"> <table width="100%" border="0" cellpadding="0" cellspacing="0" style="border-width:1px; border-style:solid; border-color:#CCCCCC; padding:0.5em">  <tr> <td width="310" height="210" valign="top"> <div id="imi"><img src="Grafiken/Beschichtung.jpg" width="300" height="200"></div> </td> </tr> <tr> <td width="310" height="20" valign="top"> <strong id="txt1" class="Stil8">Thin film deposition</strong> </td> </tr> <tr> <td width="310" height="100" valign="top"> <div id="txt2" class="Stil10" >For the generation of functional or masking films we have a variety of processes and materials available. We are able to deposit lots of metals, oxides and other materials. Film thicknesses can be varied from a few nanometer up to a few 100 micrometer. It is possible to deposit on materials like glas, silicon, plastic and others.</div> </td> </tr> </table></td> </tr> </table> </td> <td width="30" valign="top"><table width="100%" border="0" cellpadding="0" cellspacing="0">  <tr> <td width="30" height="565"> </td> </tr> </table></td> <td width="200"> </td> </tr> <tr> <td height="6"></td> <td></td> <td></td> <td></td> </tr> </table> </body>